Deposition and Etch Vacuum Chamber Solutions
Uncontrolled thermal gradients in a vacuum chamber substantially reduce process repeatability and wafer yields. The harsh environment including chemical, plasma, vacuum and temperature increases material and process contamination. One solution does not work for all vacuum-based applications. Watlow designs metal and ceramic heater and sensor components that are compatible with most vacuum environments.
Watlow's new ceramic heaters include AIN and AIO3 based designs that offer precise high temperature pedestal heater solutions for bake stations and in-situ vacuum environments. Metal heaters can be incorporated into the walls and lid of vacuum chambers to prevent condensation. Pure aluminum and higher temperature stainless steel assemblies are also excellent solutions for many CVD, PVD and etch applications. Watlow is prepared to supply the complete turnkey thermal subassemblies for vacuum applications.
Related Products
- Temperature Sensor Technologies
- Thick Film Flat Panel Display Heaters
- Thick Film Heaters on Ceramic Substrates
- Wafer Chuck and Pedestal Assemblies
- High Performance Metal Sheath Heaters
Related Literature, News and Downloads
Click on the below links for more product information. PDF documents require Adobe® Reader® version 7 or higher for viewing.
| Specification Sheets & Brochures | Size/Pages |
|---|---|
| Cable/Coil Heaters | 84K / 2 (PDF) |
| EHG SL10 Process Controller and Safety Limit | 2,050K / 4 (PDF) |
| Engineering Solutions for Your Thermal Systems | 247K / 8 (PDF) |
| High Performance Metal Sheath Heaters | 121K / 3 (PDF) |
| RELIALINE™ 170 Heating System | 243K / 2 (PDF) |
| Semiconductor Processing | 1,966K / 36 (PDF) |
| Temperature Sensor Technologies | 105K / 4 (PDF) |
| Thick Film Flat Panel Display Heaters | 37K / 1 (PDF) |
| Wafer Chuck and Pedestal Assemblies | 66K / 2 (PDF) |
| Related News Releases and Newsletters | Date |
|---|---|
| Interference Fit Construction Heaters from Watlow® Improve ... | 15-Jul-2008 |
| Watlow® Introduces the RELIALINE™ 170 Heating System, ... | 15-Jul-2008 |
| Large Thick Film Heaters from Watlow® Improve Temperature ... | 15-Jul-2008 |
| Watlow Opens a Semiconductor Technology Design Center | 12-Jul-2007 |
| Thick Film Heaters on Ceramics Provide Exceptional Thermal Performance, ... | 19-Nov-2002 |
| Watlow Features Full Line of Sensor Technology at SEMICON West 2002 Show | 22-Jul-2002 |
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